Product Description

micrometer xy linear stage,usd for microscope nano,piezo actuator pzt

P16 series piezoelectric scanner is an XY-axis translation scanning platform adopting amplifying mechanism. The travel can be up to 80μm, and the open-loop/closed loop is optional.

Characteristics 

• Travel to 80μm

• Load capacity to 1.5kg

• Closed loop for high repeatability

• Optional vacuum version

High Stiffness, Large Load Capacity

 P16 series piezoelectric scanner adopts the principle of mechanism amplification design and built-in high-performance piezo actuator. The scanner can realize the travel of 50μm or 80μm.

P16.XY100 requires a three-channel piezoelectric controller with one constant-voltage output channel.

P16 XY piezo scanner is differentially controlled and widely used in microscopic imaging and other fields due to its small size, large load and high dynamics.

Technical Data

Type		S-Closed loop K-Open loop	P16.XY50S P16.XY50K	P16.XY80S P16.XY80K	P16.XY100S P16.XY100K	Units
Active axes			X, Y	X, Y	X, Y
Driving channels			2	3	3
Travel range	0~100V		-	±33/axis	±33/axis	μm±10%
	0~120V		40/axis	-	-
Travel range	0~120V		-	±40/axis	±40/axis	μm±10%
	0~150V		50/axis	-	-
Sensor			SGS/-	SGS/-	SGS/-
Aperture size			Ø20	Ø43	Ø20	mm
Resolution			1.5/0.5	2.5/1	2.5/1	nm
Linearity			1/-	X0.3Y1/-	1/-	%F.S.
Repeatability			1/-	X0.1Y0.5/-	0.5/-	%F.S.
Pitch/yaw/roll			<20	<10	<25	μrad
Push/pull force			30/10	50/15	30/30	N
Stiffness in motion direction			0.5	1	0.5	N/μm±20%
Unloaded resonant  frequency			500	700	600	Hz±20%
Unloaded step time			10/0.8	5/1.5	10/1.6	ms±20%
Load capacity			1.5	0.5	1.5	kg
El. capacitance			1.8/axis	3.6/axis	3.6/axis	μF±20%
Material			Steel, Al	Steel, Al	Steel, Al
Mass			200	470	220	g±5%

Typical Applications

• Precision positioning

• Microscopic imaging

• Optical

• Interference/metering

• Surface inspection

• Micro-operation 

Payment Terms︰ 100% T/T