micrometer xy linear stage,usd for microscope nano,piezo actuator pzt
P16 series piezoelectric scanner is an XY-axis translation scanning platform adopting amplifying mechanism. The travel can be up to 80μm, and the open-loop/closed loop is optional.
Characteristics
• Travel to 80μm
• Load capacity to 1.5kg
• Closed loop for high repeatability
• Optional vacuum version
High Stiffness, Large Load Capacity
P16 series piezoelectric scanner adopts the principle of mechanism amplification design and built-in high-performance piezo actuator. The scanner can realize the travel of 50μm or 80μm.
P16.XY100 requires a three-channel piezoelectric controller with one constant-voltage output channel.
P16 XY piezo scanner is differentially controlled and widely used in microscopic imaging and other fields due to its small size, large load and high dynamics.
Technical Data
|
Type
|
S-Closed loop
K-Open loop
|
P16.XY50S
P16.XY50K
|
P16.XY80S
P16.XY80K
|
P16.XY100S
P16.XY100K
|
Units
|
|
Active axes
|
X, Y
|
X, Y
|
X, Y
|
|
|
Driving channels
|
2
|
3
|
3
|
|
|
Travel range
|
0~100V
|
-
|
±33/axis
|
±33/axis
|
μm±10%
|
|
0~120V
|
40/axis
|
-
|
-
|
|
Travel range
|
0~120V
|
-
|
±40/axis
|
±40/axis
|
μm±10%
|
|
0~150V
|
50/axis
|
-
|
-
|
|
Sensor
|
SGS/-
|
SGS/-
|
SGS/-
|
|
|
Aperture size
|
Ø20
|
Ø43
|
Ø20
|
mm
|
|
Resolution
|
1.5/0.5
|
2.5/1
|
2.5/1
|
nm
|
|
Linearity
|
1/-
|
X0.3Y1/-
|
1/-
|
%F.S.
|
|
Repeatability
|
1/-
|
X0.1Y0.5/-
|
0.5/-
|
%F.S.
|
|
Pitch/yaw/roll
|
<20
|
<10
|
<25
|
μrad
|
|
Push/pull force
|
30/10
|
50/15
|
30/30
|
N
|
|
Stiffness in motion direction
|
0.5
|
1
|
0.5
|
N/μm±20%
|
|
Unloaded
resonant frequency
|
500
|
700
|
600
|
Hz±20%
|
|
Unloaded step time
|
10/0.8
|
5/1.5
|
10/1.6
|
ms±20%
|
|
Load capacity
|
1.5
|
0.5
|
1.5
|
kg
|
|
El. capacitance
|
1.8/axis
|
3.6/axis
|
3.6/axis
|
μF±20%
|
|
Material
|
Steel, Al
|
Steel, Al
|
Steel, Al
|
|
|
Mass
|
200
|
470
|
220
|
g±5%
|
Typical Applications
• Precision positioning
• Microscopic imaging
• Optical
• Interference/metering
• Surface inspection
• Micro-operation
