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1~3 axes piezo nano positioner for micro-nanopositioning highly precision
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| Brand Name︰ | CoreMorrow |
| Country of Origin︰ | China |
| Minimum Order︰ | 1 pc |
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Models
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S-Closed loop
K-Open loop
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P11.X100S
P11.X100K
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P11.Z100S
P11.Z100K
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P11.Z200S
P11.Z200K
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P11.Z300S
P11.Z300K
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P11.XY100S
P11.XY100K
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P11.XZ100S
P11.XZ100K
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P11.XYZ100S
P11.XYZ100K
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Units
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Active axes
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X
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Z
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Z
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Z
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XY
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XZ
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XYZ
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Travel range(0~120V)
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80
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80
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160
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240
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80/axis
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80/axis
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80/axis
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μm±20%
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Travel range(0~150V)
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100
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100
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200
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300
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100/axis
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100/axis
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100/axis
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μm±20%
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Integrated sensor
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SGS/-
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SGS/-
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SGS/-
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SGS/-
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SGS/-
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SGS/-
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SGS/-
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Closed/open loop resolution
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7/4
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7/4
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7/4
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7/4
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7/4
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7/4
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7/4
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nm
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Closed-loop linearity
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0.05/-
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0.05/-
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0.15/-
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0.5/-
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0.1/-
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0.1/-
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0.1/-
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%F.S.
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Repeatability
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0.02/-
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0.02/-
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0.06/-
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0.12/-
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0.03/-
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0.03/-
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0.05/-
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%F.S.
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Pitch/Yaw/Roll
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<10
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<10
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<10
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<10
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<10
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<10
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<10
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μrad
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Push/pull force capacity
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30/10
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30/10
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70/6
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50/4
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25/10
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25/10
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30/5
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N
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Stiffness
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0.3
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0.3
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0.45
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0.25
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X0.25/Y0.3
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X0.25/Z0.3
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X0.25/Y0.3/Z0.2
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N/μm±20%
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Unloaded resonant frequency
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0.3
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0.3
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0.18
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0.12
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X0.2/Y0.3
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X0.2/Z0.3
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X0.2/Y0.3/Z0.18
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kHz±20%
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Closed/open-loop unloaded Step time
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10/0.8
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10/0.8
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10/0.8
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10/0.8
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15/0.8
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15/0.8
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20/0.8
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ms±20%
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Unloaded operating frequency
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10% Travel
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100
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100
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100
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100
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100
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100
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50
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Hz±20%
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100% Travel
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9
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10
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10
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10
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9
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9
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5
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Load capacity
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0.8
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0.8
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0.5
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0.4
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0.7
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0.7
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0.6
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kg
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Electrical capacitance
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1.8
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1.8
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3.6
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5.4
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1.8/axis
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1.8/axis
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1.8/axis
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μF±20%
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Material
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Steel, Aluminum
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Mass
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100
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100
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170
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230
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170
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170
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230
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g±5%
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Product Image
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