Piezo micrometer refers to integrating piezo stage on manual micrometer. The manual micrometer has 13mm displacement. The piezo stage features 25μm or 100μm displacement. The accuracy of micrometer is within the adjustment range of piezo stage, thus ensuring the accuracy and convenience of the adjustment.
Characteristics
• X axis, 1~3 axes are available
• Manual micrometer displacement to 13mm, resolution to 10µm
• Selectable sensor
• Piezo displacement up to 25µm, 100µm or 250µm, reslution to 0.5nm
Two Types
There are 2 types of piezo micrometers, P83's displacement is 25µm and P84's is 100µm or 250µm.
1~3 Axes
After the piezo micrometer is equipped with a movable table, you can choose free combination of 1~3 dimensions.
Technical Data
|
Type
|
S-Closed loop
K-Open loop
|
P83.X25S
P83.X25K
|
P84.X100S
P84.X100K
|
P84.X250S
P84.X250K
|
Units
|
|
Active axes
|
X
|
X
|
X
|
/
|
|
Travel range
|
13mm+25µm
|
13mm+100µm
|
13mm+250μm
|
/
|
|
Material
|
Steel
|
Steel, Aluminum
|
Steel, Aluminum
|
/
|
|
Manual Adjustment - Micrometer
|
|
Travel range
|
13
|
13
|
13
|
mm
|
|
Resolution
|
10
|
10
|
10
|
µm
|
|
Driving mode
|
Screw thread pair
|
Screw thread pair
|
Screw thread pair
|
/
|
|
Sensitivity
|
<2
|
<2
|
<2
|
µm
|
|
Least count
|
10
|
10
|
10
|
µm/div
|
|
Screw pitch
|
0.5
|
0.5
|
0.5
|
mm/rev.
|
|
Piezo Adjustment - Piezo
|
|
Travel range
|
0~120 V
|
20
|
80
|
200
|
µm±20%
|
|
0~150 V
|
25
|
100
|
250
|
µm±20%
|
|
Sensor
|
SGS/-
|
SGS/-
|
SGS/-
|
/
|
|
Resolution
|
1/0.5
|
3/1
|
7/2
|
nm, typ.
|
|
Closed-loop linearity
|
0.2/-
|
0.1/-
|
0.1/-
|
%F.S.
|
|
Repeatability
|
0.1/-
|
0.05/-
|
0.05/-
|
%F.S.
|
|
Push force capacity
|
20
|
16
|
8
|
N
|
|
Stiffness
|
2
|
1
|
0.03
|
N/µm±20%
|
|
Unloaded resonant frequency
|
-
|
380
|
210
|
Hz±20%
|
|
Load ( Z axis )
|
500
|
500
|
200
|
g
|
|
Operating temperature
|
-20~80
|
-20~80
|
-20~80
|
°C
|
|
Electrical capacitance
|
1.8
|
1.8
|
7.2
|
µF±20%
|
|
Cable
|
1.5
|
1.5
|
1.5
|
m±10mm
|
|
Connector
|
LEMO
|
LEMO
|
LEMO
|
/
|
Applications
• Optical alignment
• Cell manipulation
• Precision positioning of CCD camera focus lens
• Micromachining/precision control
