Large tilt angle to 45mrad precision 0.1urad piezo tip/tilt stage active optics

Models

S - closed loop

K - open loop

P35.T40S-B2

P35.T40K-B2

P35.T10S-B1

P35.T10K-B1

Units

Active axis

θx θy

θx θy

Tilt angle（0~120V）

35/±17.5

(≈±3600")

20/±10

(≈2060")

mrad±20%

Tilt angle（0~150V）

43/±21.5

(≈±4400")

25/±12.5

(≈2570")

mrad±20%

Sensor type

SGS/-

SGS/-

Closed/open loop resolution

4/1

(≈0.8"/0.2")

2/1

(≈0.4/0.2")

μrad

Linearity

0.02/-

0.1/-

%F.S.

Repeatability

0.014/-

0.01/-

%F.S.

Unloaded resonant frequency

1500

800

Hz±20%

Resonant frequency

480(@10.6g)

215(@30g)

200(@

ф55×10 mirror)

Hz±20%

Closed/open loop step time@10.6g

10/1.2

-

ms±20%

Closed loop step time@30g

25

-

ms±20%

El.capacitance

7.2

14.4

μF±20%

Material

Titanium, aluminum

Mass

335

450

g±5%